Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The influence of the dimensionality on the performance of tunneling field-effect transistors is investigated with simulations. It is shown that in a three-dimensional tunneling FET it is possible to achieve inverse subthreshold slopes smaller than 60 mV/dec. However, there is a trade-off between high on-currents and small values for the subthreshold swing. Using a carbon nanotube tunneling FET as an example it is shown that in contrast to the 3D case, one-dimensional systems offer the possibility to combine a high on-state performance with steep inverse subthreshold slopes. © 2007 Elsevier Ltd. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures