Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We obtain some dramatic results using statistical mechanics-thermodynamics kinds of arguments concerning randomness, chaos, unpredictability, and uncertainty in mathematics. We construct an equation involving only whole numbers and addition, multiplication, and exponentiation, with the property that if one varies a parameter and asks whether the number of solutions is finite or infinite, the answer to this question is indistinguishable from the result of independent tosses of a fair coin. This yields a number of powerful Gödel incompleteness-type results concerning the limitations of the axiomatic method, in which entropy-information measures are used. © 1987.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Tong Zhang, G.H. Golub, et al.
Linear Algebra and Its Applications
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences