A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
A new polymer multilayer fabrication method by the use of thin films of lamellar polystyrene-block-poly(methyl methacrylate was investigated. The thin-film striped patterns of parallel and perpendicular polystyrene-block- poly(methyl methacrylate) (PS-b-PMMA) lamellar to compare the time evolution of ε were prepared. The thin films of cylindrical and lamellar materials were spin casted and annealed for a time range of 5-4000 minutes. The perpendicular orientation of the lamellar domains were surface pretreated with a random copolymer brush prior to diblock copolymer applications. The measurements show that the topological differences between the cylindrical and lamellar morphologies influence coarsening kinetics.
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
M. Hargrove, S.W. Crowder, et al.
IEDM 1998