Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Measurement and calculation of the inductance of a nonstraight conductor close to ground return plane are considered. An equivalent circuit model solution is given, and the results are compared to measurements for a corner-type geometry. Much larger changes in inductance as a function of frequency have been observed for the corner-type geometry than for the equivalent straight-conductor geometry. The circuit model can be used to predict the inductance for other configurations. Copyright © 1975 by The Institute of Electrical and Electronics Engineers, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SPIE Advanced Lithography 2008
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MRS Fall Meeting 2020
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