Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Given a square, nonnegative, symmetric matrix A, the Rayleigh quotient of a nonnegative vector u under A is given by QA(u) = uTAu/uTu. We show that QA(√u° Au) is not less than QA(u), where √ denotes coordinatewise square roots and ° is the Hadamard product, but that QA(Au) may be smaller than QA(u). Further, we examine issues of convergence. © 1997 Published by Elsevier Science Inc.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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VTC Spring 2007
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SPIE Photomask Technology + EUV Lithography 2009
Peter Wendt
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