R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
The often observed decrease in relative permittivity (ε') and refractive index (n) that accompanies fluorine substitution is the result of several effects. Fluorine replacement for hydrogen is known to decrease local electronic polarization and is thought to frequently increase fractional free volume. Both of these effects can independently decrease ε' and n, and this paper attempts to assign the observed decreases between these mechanigms for a series of hydrogen/fluorine polyimide analogs.
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
T.N. Morgan
Semiconductor Science and Technology
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting