Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Results of ir and Raman investigations on trigonal layer-structured Si2Te3 single crystals are reported. The ir reflection spectrum with E⊥c exhibits seven reststrahl-like bands, whereas the corresponding spectrum with E∥c shows only one very small bump. Values for ε0 and ε∞ are given. The Raman spectra are very rich in structure and can only be interpreted qualitatively as being a mixture of single phonon lines and one- and two-phonon density-of-states contributions. One-phonon density-of-states effects are disorder-induced owing to the statistical occurrence of the Si atoms within the regular hexagonal Te sublattice. © 1976 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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MRS Fall Meeting 2020
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