Conference paper
Application of atomic-force microscopy to phase-shift masks
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
An infrared imaging system has been used to measure the thermal response of the print head electrodes during resistive ribbon thermal transfer printing. This has proved to be an effective method for fast, non-contact, high spatial resolution temperature measurements, providing valuable information on the thermal stress upon the head materials and on the amount of energy flowing into the head during printing.
A.P. Ghosh, D.B. Dove, et al.
Microlithography 1992
D. Manzer, R. Lane, et al.
Proceedings of SPIE 1989
Juan Agui, P.N. Sanda, et al.
Electronic Imaging: Advanced Devices and Systems 1990
D.B. Dove, Alan E. Rosenbluth
EURODISPLAY 1997