Infrared laser induced reaction of SF6 with silicon surfaces

Paper

15 Jul 2008

Infrared laser induced reaction of SF₆ with silicon surfaces

No abstract available.

Paper

A. Modi, K. Domen, et al.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

T.J. Chuang, C.R. Brundle, et al.

Surface Science

Conference paper

H. Coufal, T.J. Chuang, et al.

International Conference on Laser Processing and Diagnostics 1983

Paper

T.J. Chuang

The Journal of Chemical Physics