T.J. Chuang
Journal of Applied Physics
Paper
Infrared laser induced reaction of SF6 with silicon surfaces
Abstract
No abstract available.
Related
A. Modi, K. Domen, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
T.J. Chuang, K.B. Eisenthal
IEEE JQE
T.J. Chuang
The Journal of Chemical Physics