Conference paper
Contrast enhanced UV lithography with polysilanes
Donald C. Hofer, Robert D. Miller, et al.
Microlithography 1984
Donald C. Hofer, Robert D. Miller, et al.
Microlithography 1984
Ilya Zharov, Anil Saxena, et al.
Inorganic Chemistry
Willi Volksen, Robert D. Miller, et al.
Chemical Reviews
John J. Stankus, Scott M. Silence, et al.
SPIE Holography 1968