E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Sung Ho Kim, Oun-Ho Park, et al.
Small
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Revanth Kodoru, Atanu Saha, et al.
arXiv