Conference paper
CMOS scaling beyond 22 nm node
D.K. Sadana, S.W. Bedell, et al.
ECS Meeting 2009
Negative refractive index changes of up to 1.7 ×10-3 have been induced by 248 nm excimer laser light in planar germanium-free SiON waveguides. Highly temperature-stable 4OdB Bragg gratings with a length of 8mm have been written. A novel mechanism of photosensitisation was used to create the high-index changes.
D.K. Sadana, S.W. Bedell, et al.
ECS Meeting 2009
N. Blanc, P. Guéret, et al.
ESSDERC 1991
D. Wiesmann, C. David, et al.
IEEE Photonics Technology Letters
Yanning Sun, E.W. Kiewra, et al.
ICICDT 2009