M.Y. Chern, A. Gupta, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Laser-assisted etching of YBa2Cu3O 7-δ
Abstract
Superconducting YBa2Cu3O7-δ has been etched using a focused cw Ar+ laser beam in KOH solution. The results indicate clean and rapid removal of reaction products leaving high aspect ratio grooves. Etch rates are investigated under several conditions; etch geometry is discussed as a function of laser power density and scan speed. The surface reaction with KOH is thermally activated, and the residual material is identified by energy dispersive x-ray spectroscopy, x-ray powder diffraction, and chemical analysis.
Related
L. Spinu, H. Srikanth, et al.
IEEE Transactions on Magnetics
S.I. Raider, A. Gupta, et al.
Applied Physics Letters
E. Zeldov, N. Amer, et al.
Physical Review B