C.C. Tsuei, J.R. Kirtley, et al.
Physica C: Superconductivity and its Applications
Superconducting YBa2Cu3O7-δ has been etched using a focused cw Ar+ laser beam in KOH solution. The results indicate clean and rapid removal of reaction products leaving high aspect ratio grooves. Etch rates are investigated under several conditions; etch geometry is discussed as a function of laser power density and scan speed. The surface reaction with KOH is thermally activated, and the residual material is identified by energy dispersive x-ray spectroscopy, x-ray powder diffraction, and chemical analysis.
C.C. Tsuei, J.R. Kirtley, et al.
Physica C: Superconductivity and its Applications
A. Gupta, G. Koren, et al.
Proceedings of SPIE 1989
R.B. Laibowitz, R.H. Koch, et al.
Journal of The Less-Common Metals
B.W. Hussey, A. Gupta, et al.
Journal of Applied Physics