Carl E. Larson, Thomas H. Baum, et al.
JES
High quality gold spots and lines have been deposited from gaseous dimethyl (2, 4-pentanedionato) gold (III) using a focused argon ion laser. Growth rates of 1 μm/s at power densities of 4×105 W/cm2 were obtained. Resistivity, threshold writing power densities, and deposition rates were measured and their relationship to the physical and chemical properties of the gaseous complex are explored.
Carl E. Larson, Thomas H. Baum, et al.
JES
Toivo T. Kodas, Thomas H. Baum, et al.
Journal of Applied Physics
Thomas H. Baum
JES
Thomas H. Baum, Carl E. Larson, et al.
Applied Physics Letters