Ronald Troutman
Synthetic Metals
Two general modes of laser-induced cleaning techniques, steam laser cleaning and dry laser cleaning, are investigated. The first mode utilizes pulsed laser heating to cause rapid explosive evaporation of a micron-thick liquid film deposited on the surface just before flash heating. The removal of contaminant particles is caused by a strong acoustic wave generated by the explosion. The second mode relies on thermal shock, bond breaking, or ablative photodecomposition of the contaminant on the surface.
Ronald Troutman
Synthetic Metals
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J.H. Stathis, R. Bolam, et al.
INFOS 2005
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990