William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
A. Krol, C.J. Sher, et al.
Surface Science
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000