Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A simple interferometric technique is described for monitoring thickness changes in solution‐cast polymer films as they are dried and cured. This paper follows a freshly spun solution of polyamic acid in NMP as it is converted into a cured polyimide film of 6 μm in thickness. The technique is shown to be nearly quantitative despite the effects of thermal expansion and cure‐related refractive index changes. Copyright © 1987 John Wiley & Sons, Inc.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Ronald Troutman
Synthetic Metals
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry