Sean M. Polvino, Conal E. Murray, et al.
Applied Physics Letters
We have used scanning microdiffraction topography to determine the mismatch strains and local strain distributions in silicon-on-insulator substrates with overlying thin film stressor features. Analysis of the data using the edge-force model and the Ewald-von Laue dynamical diffraction theory shows the presence of an exponential strain gradient in the vicinity of the buried SiO2 /Si -substrate interface. We show that, for simple geometries, it is possible to deduce the sign of the mismatch strain simply by inspecting the microdiffraction topograph. © 2008 American Institute of Physics.
Sean M. Polvino, Conal E. Murray, et al.
Applied Physics Letters
Conal E. Murray, I.C. Noyan
Philosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Mikhail Treger, C. Witt, et al.
Thin Solid Films
Zachary H. Levine, Steven Grantham, et al.
Journal of Applied Physics