A. Gangulee, F.M. D'Heurle
Thin Solid Films
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020