William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Revanth Kodoru, Atanu Saha, et al.
arXiv