Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have studied the two-dimensional properties of high-mobility electron-hole systems in InAs quantum wells bounded by Ga1-xAlxSb. By changing the alloy composition x, we are able to vary the system from quasi-semimetallic (with unequal electron and hole carrier concentrations) to semiconducting (with only electrons). Furthermore, we have observed a magnetic-field-induced semimetal-to-semi-conductor transition which manifests itself in the magnetotransport properties of samples with both carriers. This transition can be understood by considering the continuity of the Fermi energy across the InAs/Ga1-xAlxSb interface and the interdependence of the electron and hole densities. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Peter J. Price
Surface Science
K.A. Chao
Physical Review B