Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
Detection of short-range interactions in combination with tunneling microscopy provides a means for characterizing the chemical nature of surfaces. Results are presented that demonstrate that carbon adsorbed on a rough, polycrystalline Ir surface can be detected on an atomic level. © 1994 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
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