Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
The effects of a surface electric dipole layer on the emission of negative secondary ions from clean and oxidized Si(111) surfaces have been studied under static-mode, 500-eV Ne+ bombardment. For clean Si(111) surfaces, the work-function dependence of the emission of Si- is independent of whether Cs or Li adatoms are used to create the dipole layer. However, in the presence of an oxygen matrix, the dependence of Si- emission is altered from the clean Si case and is dependent on the particular alkali dipole layer used, illustrating the importance of matrix effects in negative-ion emission. © 1982 The American Physical Society.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.