Ch. Fattinger, D. Grischkowsky
Applied Physics Letters
Paper
Measurement of the velocity distribution of sputtered Na atoms from NaCl by Doppler shift laser fluorescence
Abstract
The velocity distribution of sputtered Na atoms from NaCl during 15 keV, Ar+ bombardment was measured by a Doppler shift laser fluorescence technique. Contrary to other measurements, the sputtered Na atoms were found to have a velocity distribution identical to that of a three-dimensional Maxwell-Boltzmann gas.
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