L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Paper
Mechanical properties of thin films
Abstract
No abstract available.
Related
Frank Stem
C R C Critical Reviews in Solid State Sciences
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010