Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Using the molecular dynamics simulation technique, I have studied the melting of submonolayer xenon, krypton, and argon films on graphite. I observe first-order melting of xenon which mimics the melting of an idealized two-dimensional film, first-order melting of krypton with the existence of an "incipient triple point," and continuous melting of argon over a temperature interval of approximately 7 K. The role of the graphite lateral substrate structure on the melting of these various rare-gas films is emphasized. The simulation experiments are consistent with a recent high-resolution x-ray experiment of melting by McTague et al. [Phys. Rev. B 25, 7765 (1982)]. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009