Kerem Unal, Jane Frommer, et al.
Applied Physics Letters
We demonstrate a new method for imaging vertical and near vertical surface features by atomic force microscopy (AFM). It is based on an attractive force mode AFM, equipped with a special boot-shaped tip, coupled with a measurement of slope and with a special tracking technique. Surface profiling is achieved through a novel servo and scanning system. Mapping sidewall profile opens the door to measurement of critical dimensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy.
Kerem Unal, Jane Frommer, et al.
Applied Physics Letters
Marcus Freitag, Mathias Steiner, et al.
Nano Letters
Theodore Van Kessel, Ayman Abduljabar, et al.
PVSC 2009
Jessie C. Rosenberg, Folkert Horst, et al.
ECOC 2017