Robert W. Keyes, Erik P. Harris, et al.
Proceedings of the IEEE
The long-continued advance of the performance of information processing technologies has been based on miniaturization of components. The history of miniaturization is presented. The history suggest that limits proposed by Landauer in the 1960s will be reached in two or three decades.
Robert W. Keyes, Erik P. Harris, et al.
Proceedings of the IEEE
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
Rajeev Gupta, Shourya Roy, et al.
ICAC 2006