Modelling NEM relays for digital circuit applications

Abstract

A reduced-order model for NEM relays is presented that combines electro-mechanical beam actuation and landing of beam tip on the surface electrode. This model shows a deviation of less than 2%, for the DC as well as the transient response for beam actuation in a circuit simulation, when compared to a finite-element simulation. It also shows an excellent match for the energy. The model allows accurate circuit simulation to aid in NEM-relay based logic design, and facilitates the quantification of key gate-level metrics. © 2013 IEEE.