Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.A. Barker, D. Henderson, et al.
Molecular Physics
K.A. Chao
Physical Review B
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Journal of Polymer Science Part A: Polymer Chemistry