Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Molecular-dynamics studies of a model belonging to the Ising universality class, covering the order-disorder and displacive regime of distortive phase transitions, are reviewed. The results offer a unified picture of these transitions in terms of clusters and their dynamics. As a consequence, the soft-phonon picture sufficiently close to Tc is expected to fail. © 1980, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert W. Keyes
Physical Review B
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP