Advanced chemical microsensor systems in CMOS technology
Y. Li, C. Vancura, et al.
SENSORS 2004
This paper presents a monolithically integrated multi-transducer microsystem to detect organic and inorganic gases. The system comprises two polymer-based sensor arrays, a metal-oxide-based sensor array, driving and signal processing electronics and a digital communication interface (Figure 1). The chip is fabricated in industrial 0.8 μm CMOS-technology with subsequent post-CMOS micromachining and operates at a supply voltage of 5 volt. The monolithic integration of different transducer types with associated driving and read-out circuitry significantly improves the discrimination capability of the system and reduces the packaging efforts. © 2005 IEEE.
Y. Li, C. Vancura, et al.
SENSORS 2004
C. Vančura, M. Rüegg, et al.
Analytical Chemistry
Firas Sammoura, Ying Cai, et al.
TRANSDUCERS 2005
Y. Li, C. Vancura, et al.
SENSORS 2003