Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Extending the Monte Carlo method to dynamic critical phenomena we investigated the time-dependent correlation functions in the two-dimensional one-spin-flip Ising model and the critical behavior of the associated relaxation times. These relaxation times are the following: τδμΔT, characterizing the approach of the order parameter to equilibrium after a change of temperature ΔT of the system; τδμδμ and τδμδμA characterizing the slowing down of the order-parameter correlation and autocorrelation functions, respectively; τδHδH and τδHδHA, characterizing the slowing down of the energy correlation and autocorrelation functions; and finally τδμδH, characterizing the cross-correlation function. We give estimates for the associated exponents ΔδμΔTΔδμδμΔδHδ HΔδμδH1.90±0.10, and ΔδμδμA1.60±0.10, ΔδμδHA0.95±0.10, ΔδHδHA0, which are consistent with the dynamic scaling hypothesis and with exact inequalities. A detailed comparison with recent high-temperature-expansion estimates is performed, and the reliability of the Monte Carlo results is carefully analyzed. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
E. Burstein
Ferroelectrics