Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) in the three-dimensional space is proposed. The method is quite general in terms of scattering matrix and band structure. We show a numerical application to a two-dimensional p-n junction. © 1992.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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IEEE TPAMI
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
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SPIE Advanced Lithography 2008