Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) in the three-dimensional space is proposed. The method is quite general in terms of scattering matrix and band structure. We show a numerical application to a two-dimensional p-n junction. © 1992.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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SPIE Advanced Lithography 2007
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ISIT 2007
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Proceedings of SPIE - The International Society for Optical Engineering