Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
We study multihomogeneous analytic functions and a multihomogeneous Newton's method for finding their zeros. We give a convergence result for this iteration and we study two examples: the evaluation map and the generalized eigenvalue problem.
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
T. Graham, A. Afzali, et al.
Microlithography 2000
Fausto Bernardini, Holly Rushmeier
Proceedings of SPIE - The International Society for Optical Engineering
F. Odeh, I. Tadjbakhsh
Archive for Rational Mechanics and Analysis