Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We study the slender vortex approximation with emphasis on the high Reynolds number behavior. It is shown that the breakdown of the approximation coincides with the critically condition as introduced by Benjamin [1]. We study free vortices with and without an adverse pressure gradient for viscous and inviscid flows. Finally, we compare with the experimental results from Faler and Leibovich [2]. © 1988.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Chi-Leung Wong, Zehra Sura, et al.
I-SPAN 2002
Robert C. Durbeck
IEEE TACON
David S. Kung
DAC 1998