Conference paper
Optical imaging of picosecond switching in CMOS circuits
J.A. Kash, J.C. Tsang
CLEO 1997
Raman scattering and optical transmission measurements have been made on chemically vapor-deposited Si-rich SiO2 films. The measurements show segregated regions of amorphous silicon in the as-deposited films. Annealing the films at 1150°C completely crystallizes the amorphous silicon. Annealing at lower temperatures produces films with both amorphous and crystalline regions.
J.A. Kash, J.C. Tsang
CLEO 1997
J.C. Tsang, V.P. Kesan, et al.
Physical Review B
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Applied Physics Letters
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Journal of Applied Physics