M. Horn-Von Hoegen, M. Copel, et al.
Physical Review B
Raman scattering and optical transmission measurements have been made on chemically vapor-deposited Si-rich SiO2 films. The measurements show segregated regions of amorphous silicon in the as-deposited films. Annealing the films at 1150°C completely crystallizes the amorphous silicon. Annealing at lower temperatures produces films with both amorphous and crystalline regions.
M. Horn-Von Hoegen, M. Copel, et al.
Physical Review B
D. Arnold, E. Cartier, et al.
Physical Review B
Thomas R. Puzak, A. Hartstein, et al.
FCRC 2007
D.J. Dimaria, P.C. Arnett
Applied Physics Letters