Conference paper
Characterization of line width variation
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SPIE Advanced Lithography 2000
We study an approximation method of stationary characters of a two-dimensional Markov chain via the Stein method. For this purpose, innovative methods are developed to estimate the moments of the Markov chain, as well as the solution to the Poisson equation with a partial differential operator.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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AAAI 2025