Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
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F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
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Proceedings of SPIE 1989
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Journal of Computational Physics
J. LaRue, C. Ting
Proceedings of SPIE 1989