A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Paper
On an optimal method for the numerical differentiation of smooth functions
Abstract
Given a smooth function f{hook} and a bound on its derivatives we construct an optimal linear estimator for f{hook}′(0) which uses only function values of f{hook}. © 1976.
Related
Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Conference paper
Neave effect also occurs with Tausworthe sequences
Shu Tezuka
WSC 1991
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998