William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
A.R. Gourlay, G. Kaye, et al.
Proceedings of SPIE 1989