M. Liehr, P.E. Schmid, et al.
JVSTA
No abstract available.
M. Liehr, P.E. Schmid, et al.
JVSTA
P. Gas, F.M. D'Heurle, et al.
Journal of Applied Physics
F.K. LeGoues, V.P. Kesan, et al.
Physical Review Letters
O. Thomas, P. Gas, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films