William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Raghu Krishnapuram, Krishna Kummamuru
IFSA 2003
Michael C. McCord, Violetta Cavalli-Sforza
ACL 2007
M.J. Slattery, Joan L. Mitchell
IBM J. Res. Dev