William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
Liqun Chen, Matthias Enzmann, et al.
FC 2005
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007