Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
T. Schneider, E. Stoll
Physical Review B
Robert W. Keyes
Physical Review B