Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
A. Skumanich
SPIE OE/LASE 1992