Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
We have examined the various fundamental issues that are important for the accurate determination of the ionization probability as a function of the emission velocity. The different surface potentials encountered by the sputtered neutral atoms and the secondary ions respectively result in corrections to both the trajectories of the secondary ions and the phase space covered by the detector. © 1989, Taylor & Francis Group, LLC. All rights reserved.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
A. Reisman, M. Berkenblit, et al.
JES
R. Ghez, J.S. Lew
Journal of Crystal Growth