D. Pohl, V. Irniger, et al.
Applied Physics
Subwave length-resolution optical image recording is demonstrated by moving an extremely narrow aperture along a test object equipped with fine-line structures. Details of 25-nm size can be recognized using 488-nm radiation. The result indicates a resolving power of at least λ/20 which is to be compared with the values of λ/2.3 obtainable in conventional optical microscopy.
D. Pohl, V. Irniger, et al.
Applied Physics
P. Muralt, H.P. Meier, et al.
Superlattices and Microstructures
D. Pohl
Institute of Physics Electron Microscopy and Analysis Group Conference 1991
D. Pohl, W. Kaiser
Physical Review B