Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
This paper intends to re-examine some results and proofs given in a previous publication on optimal estimation under uncertainty. In a rather general setting we showed that regularization of an element of a linear space relative to a quadratic criterion and inaccurate linear observations is an optimal method for recovering a linear operator of that element. For this to be the case, the regularization parameter must be chosen with care. © 1993 J.C. Baltzer AG, Science Publishers.
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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International Journal of Modelling, Identification and Control
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