Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Let f0(x) be a function of one variable with a simple zero at r0. An iteration scheme is said to be locally convergent if, for some initial approximations x1, ..., xs near r0 and all functions f which are sufficiently close (in a certain sense) to f0, the scheme generates a sequence {xk} which lies near r0 and converges to a zero r of f. The order of convergence of the scheme is the infimum of the order of convergence of {xk} for all such functions f. We study iteration schemes which are locally convergent and use only evaluations of f, f′, ..., f[d] at x1, ..., xk-1 to determine xk, and we show that no such scheme has order greater than d+2. This bound is the best possible, for it is attained by certain schemes based on polynomial interpolation. © 1972 Springer-Verlag.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications
Imran Nasim, Michael E. Henderson
Mathematics