Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
No abstract available.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
David B. Mitzi
Journal of Materials Chemistry